A micropump of biomedical-microelectric mechanical system (Bio-MEMS) for drug delivery systems and health monitoring systems using a new biocompatible piezoelectric thin film was developed. We first assessed the performance of our piezoelectric thin film pump of a newly designed microfluid system using the finite element method. Numerical results show a sufficient transportation ability of our micropump system for blood tests. We generated a multilayer MgSiO3 thin film on Cu/Ti/Si (100) substrate using RF-magnetron sputtering. We measured the crystallographic orientation and piezoelectric property of the thin film and confirmed that MgSiO3 (101) crystal grew well. The strain constant d33 was calculated as 179.4 pm/V using the displacement-voltage curve. Furthermore, the deflection and eigenfrequency of the monomorph-actuator, fabricated using a micromachining process, were measured using the laser Doppler vibrometer, which revealed that the deflection linearly increased with applied voltage: it was 82.6 nm with applied voltage of 15 V. We measured the flow rate of a micropump using the luminance difference measurement method. Results showed that the maximum flow rate was 7.1 nl/s at the applied voltage of 15 V. We concluded that our newly developed MgSiO3 monomorphic micropump can be a comprehensive Bio-MEMS device.
In this study, a micro-pump for Bio-MEMS by using a new bio-compatible piezoelectric thin film is newly developed,
which could be built in DDS and HMS. At first, we carried out the performance assessment of our piezoelectric thin film
pump of a newly designed micro-fluid system by using the finite element method, which can consider the interaction
between the piezoelectric solid and the fluid. The results of numerical analyses show a enough transportation ability of
our micro-pump system. Then, we generate multilayer MgSiO3 thin film on Cu/Ti/Si(100) substrate by using RFmagnetron
sputtering method. We measured the crystallographic orientation and piezoelectric property and confirmed
that MgSiO3(101) crystal has grown well. The strain constant d33 was calculated by using the displacement-voltage curve,
such as 179.4pm/V. Further, the deflection and frequency of the monomorph-actuator, which fabricated by using the
micro-machining process, were measured by the laser doppler vibrometer. It showed that the deflection linearly
increased with applied voltage, and it was 82.6nm with the applied voltage of 15V. We evaluated the flow rate of micropump
using the luminance difference measurement method. The results showed that the maximum flow rate was 7.1nl/s
at the applied voltage of 15V. It shows the possibility of Bio-MEMS device by using our newly developed micro-pump
with a new bio-compatible piezoelectric material MgSiO3.
Recently, the lead free piezoelectric material, which should be used for medical devices, such as health monitoring
system (HMS) and drug delivery system (DDS), is strongly required. In this study, we discovered a newly designed
MgSiO3 thin film, as a biocompatible piezoelectric actuator, by using the first-principles calculation and process
crystallography simulation algorithm. At first, crystal structure was calculated by using the first-principles density
functional theory. Secondly, the best substrate for MgSiO3 was searched by using the process crystallography simulation.
Next, MgSiO3 thin film was generated in our laboratory by using the RF magnetron sputtering apparatus. Finally,
crystallographic orientation was obtained by using X-ray diffractometer and the piezoelectric property of thin film was
measured by the ferroelectric measurement system. As a result, lattice parameters of MgSiO3 with tetragonal structure
were obtained as a=b=0.3449nm and c=0.3538nm, and its aspect ratio was 1.026. Au(111) was chosen as the best
substrate, on which MgSiO3 thin film with minimum total energy could be grown. Then, MgSiO3(111) was generated on
Au(111)/SrTiO3(110) by using the RF magnetron sputtering apparatus. The piezoelectric strain constant d33 of MgSiO3
thin film generated at 400°C was measured as 219.8pm/V and it was higher than one of the existing piezoelectric
material BaTiO3. Consequently, we succeeded the generation of a new biocompatible MgSiO3 piezoelectric thin film,
which can be applied to medical devices in the future.
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