Deflectometry is a non-contact optical technique used for measuring specular free-form surfaces by projecting structured light using a display screen (LCD screen). While one-shot deflectometry has been extensively researched to develop reliable measurement methods, it is very challenging to measure and inspect complex surfaces using one-shot with low reflectivity because of obtaining phase information from a single, poor-quality complex pattern remains difficult. To address this, we propose a novel single-shot deflectometry approach that utilizes deep learning (DL) to measure complex surfaces accurately in a single shot. We employ DYnet++, a deep learning network model capable of retrieving phase information from single composite patterns. By comparing the results with the 16-step phase-shifting (PS) method, we validate the feasibility and effectiveness of our deep learning-based single-shot deflectometry, which offers potential applications in various industries.
As a summary of of the authors' previous paper of Ref 1, we describe a new scheme of a Linnik interferometric configuration based on spectrally-resolved white-light interferometry for simultaneous measurement of top surface and its underlying film surfaces in multilayer film structure. Our proposed technique enables accurate measurements of the phase and reflectance over a large range of wavelengths using the iterative least-squares phase-shifting algorithm by suppressing critical phase shift errors, and it provides a better measurement result than conventional methods. To verify our method a complex multilayer film was prepared and we measured it, and compared with well-known conventional techniques. Comparison results show our new method successfully works well with high precision as same as existing methods.
In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser ablation phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.
Currently we are developing a 10 cm silicon carbide (SiC) deformable mirror with 37 actuators operating at 500 Hz. The deformable mirror will be applied in a 1.5 m telescope. An adaptive optics system capability for the deformable mirror was simulated and performance was predicted based on the Kolmogorov atmospheric turbulence model. However, in order to confirm the predictions, a closed-loop adaptive optics system was constructed with the insertion of an atmospheric turbulence simulator consisting of two point sources, a Boston deformable mirror, and double random phase plates. In order to simulate a binary star, the two point sources are mounted on 3-axis micron meter stages and are optically merged into a single beam path by a beam splitter cube. The light intensity of each source is adjustable to a corresponding stellar magnitude, while the angular separation can be precisely adjusted by moving the 3-axis stages. The atmospheric disturbance is generated by shaping the Boston deformable mirror and also by rotating the double phase plates. The Fried parameter of the generated the atmospheric disturbance corresponds to an area from 7 to 15 cm at 500 nm at the telescope pupil plane, which represents typical seeing conditions at the Bohyun observatory, South Korea.
We present the development of a 1-m lightweight mirror system for a spaceborne electro-optical camera. The mirror design was optimized to satisfy the performance requirements under launch loads and space environment. The mirror made of Zerodur® has pockets at the back surface and three square bosses at the rim. Metallic bipod flexures support the mirror at the bosses and adjust the mirror’s surface distortion due to gravity. We also show an analytical formulation of the bipod flexure, where compliance and stiffness matrices of the bipod flexure are derived to estimate theoretical performance and to make initial design guidelines. Optomechanical performances such as surface distortions due to gravity is explained. Environmental verification of the mirror is achieved by vibration tests.
Contrary to conventional mechanical polishing methods using polyurethane or pitch tool, non-contact polishing
technique based on ion beam sputtering provides deterministic and ultra-precision surfacing at any given surfaces. Owing
to no contact between a tool and a workpiece, several issues related to tool wear and edge effects can be evitable.
Moreover, the atomic level sputtering makes it possible to obtain ultra-precision optical surfaces with a sub-nanometer
surface roughness. In this paper, we have simulated ion beam figuring process according to the characteristics of ion
beam and performed a simple test.
For the purpose of fabricating off-axis aspheric optics, we propose a 8-axis-polishing machine combined with a testing
tower whose height is about 9 m. The proposed polishing machine was designed and analysed by using a well-known
finite element method. The eight axes of the machine have a synchronized motion generated by a computer, and each
axis was calibrated by a heterodyne laser interferometer or an optical encoder. The maximum capability of the proposed
polishing machine is up to 2 m in diameter, and the maximum radius of curvature of the product (optics) is slightly over
7 m. After calibration, the maximum positioning error of the machine was less than 2 μm within a whole 2 m × 2 m area.
A typical fabrication result of a φ1.5 m concave mirror was also described in this manuscript.
A prototype of large wide field telescope is a Cassegrain telescope which covers 2° field of view with two hyperbolic mirrors, a 0.5 m primary mirror and a 0.2 m secondary mirror with multiple correction lenses. To fulfill the optical and mechanical performance requirements in design and development phase extensive finite element analyses using NX NASTRAN and optical analyses with CODE V and PCFRINGE have been conducted for the structure of optical system. Analyses include static deformation (gravity and thermal), frequency, dynamic response analysis, and optical performance evaluations for minimum optical deformation. Image motion is also calculated based on line of sight sensitivity equations integrated in finite element models. A parametric process was performed for the design optimization to produce highest fundamental frequency for a given weight, as well as to deal with the normal concerns about global performance.
We have developed a direct laser lithography system for fabrication of precision diffractive optical elements such as
Fresnel zone plates and computer-generated holograms. The developed lithography system has possible working area up
to 360 mm and minimum linewidth of 0.5 μm. To assure the performance of the lithography system, the performance
evaluation was carried out on the moving stages, the writing head module, and the light source, respectively. In this
paper, we report the performance evaluation including the standard uncertainties of each part, the combined standard
uncertainty, and finally the expanded uncertainty to give a particular level of confidence.
The auto-focusing is one of the important parts in the automated vision inspection or measurement using optical
microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision auto-focusing. In
this paper, we propose and realize an auto-focusing system using two cylindrical lenses, which is the enhanced version of
the previous astigmatism method. It shows very good performances, especially very high speed and the largest
defocusing range in comparison with the previous astigmatic methods. The performance of our auto-focusing system was
evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer.
Computer Generated Holograms (CGH) for optical test are commonly consisted of one main pattern for testing aspheric
surface and some alignment patterns for aligning the interferometer, CGH, and the test optics. To align the CGH plate
and the test optics, we designed the alignment CGHs modified from the cat's eye alignment method, which are consisted
of a couple of CGH patterns. The incident beam passed through the one part of the alignment CGH pattern is focused
onto the one radius position of the test aspheric surface, and is reflected to the other part, and vice versa. This method has
several merits compared to the conventional cat's eye alignment method. First, this method can be used in testing optics
with a center hole, and the center part of CGH plate can be assigned to the alignment pattern. Second, the alignment
pattern becomes a concentric circular arc pattern. The whole CGH patterns including the main pattern and alignment
patterns are consisted of only concentric circular fringes. This concentric circular pattern can be easily made by the polar
coordinated writer with circular scanning. The required diffraction angle becomes relatively small, so the 1st order
diffraction beams instead of the 3rd order diffraction beam can be used as alignment beams, and the visibility can be
improved. This alignment method also is more sensitive to the tilt and the lateral shift of the test aspheric surface. Using
this alignment pattern, a 200 mm diameter F/0.5 aspheric mirror and a 600 mm diameter F/0.9 mirror were tested.
We propose a new method based on direct laser writing to fabricate reference chromium patterns on a silicon wafer. Our
method is able to fabricate a maximum 360-mm-diameter pattern with 651-nm position uncertainty. The minimum
pattern size is about 0.8 μm (line width value) and the maximum available height of the pattern is slightly over 400 nm.
KRISS Space Optics Research Center has tested large aspheric surfaces by using interferometry and a series of computer-generated hologram (CGH). In this case it is necessary to fabricate various CGHs in the laboratory level. To address this purpose we are developing and improving a simple and precise laser writing system which uses a cylindrical or circular coordinate. In our system 300 mm diameter CGH can be fabricated with 0.8 μm spatial resolution in radial direction. The writing source Ar+ laser is stabilized by intensity feedback, and gives us approximately 800 mW after the stabilization process at 457.9 nm wavelength. The stabilized beam power is controlled again to make 256 different intensity levels. We also used an auto-focusing technique with astigmatic lenses for the purpose of focusing the writing beam on the material surface.
We present experimental results on the output power stabilization of an Ar+ laser for a direct circular laser writing system (CLWS). Instability of the laser output power in the CLWS causes resolution fluctuations of being fabricated diffractive optical elements or computer-generated holograms. For the purpose of reducing the power fluctuations, we have constituted a feedback loop with an acousto-optic modulator, a photodetector, and a servo controller. Here very important things are proper conception of the servo controller and selection of a proper photodetector depending on what kinds of lasers to be controlled. In this system, we have achieved the stability of ± 0.20 % for 12 minutes and the relative intensity noise level of 2.1 x 10-7 Hz-1/2 at 100 Hz. In addition, we applied our system to a 2 mW internal mirror He-Ne laser. As a consequence, we achieved the output power stability of ± 0.12 % for 25 minutes.
We present a method of aspheric surface profile measurement based on the principle of curvature sensor, which
measures the curvature of subaperture topography along a line and then reconstructs the entire profile from the
measured local curvature data. The subaperture topography is obtained by using white-light scanning interferomtery to
avoid the optical alignment error along an optical axis. Test measurement results demonstrate that the proposed method
and system is well suited for the aspheric surface profile measurement.
The high performance optical system is generally not easy to align. Particularly, if there are off-axis optical components in the system, the alignment is a very serious problem. Many researchers have reported that using sensitivity of some Zernike coefficients is useful in alignment. However, this method has a weak point in that it generates an accurate result only when the misalignments of component are located within the range where the sensitivities of coefficients are linear to the amount of misalignment. We developed the new method which allows larger misalignment at the early stage of alignment. It is to minimize the merit function of Zernike coefficients rather than to use sensitivities of coefficients. In this paper, we analyzed the cons and pros of conventional alignment method and our own method and demonstrated the accuracy and flexibility of our method by aligning the diameter 900 mm Cassegrain type collimator. Even though there was more than 1 mm decenter error, we could align the secondary mirror to the nominal position with just two trials.
We present a method of free-form surface profile measurement using white-light scanning interferometry. This method is based on the principle of curvature sensor which measures the local curvature under test along a line. The profile is then reconstructed from the curvature data on the each point. Unlike subaperture-stiching method and slope detection method curvature sensing have strong points from a geometric point of view in measuring the free-form surface profile. Curvature is related to second derivative terms of surface profile and an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.
We describe a novel method of measuring absolute distances by using a two-point diffraction source specially devised to
generate two high quality spherical waves simultaneously with a small lateral offset. Interference of the generated two
spherical waves produces a unique ellipsoidal phase distribution in the measurement space. A partial map of the resulted
interference phase field is sampled and fitted to a geometric model of multilateration that allows absolute-distance
measurements to be performed without 2π-ambiguity. The partial phase map may be obtained by use of either homodyne
or heterodyne phase measuring technique. Test results demonstrate that high precision with 1 part in 106 uncertainty can
be achieved over 1 meter distance range.
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