Mr. Hyung Jong Bae Profile

Hyung Jong Bae

at SAMSUNG Electronics Co., Ltd.

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Author

Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Holistic patterning technology for DRAM 29nm pitch contact hole and pillar patterning

Seunghak Park, Van Tuong Pham, Sangho Yun, Woojin Jung, Hyo Seon Suh, Lander Verstraete, Hyung Jong Bae, Taehoi Park, Victor Blanco Carballo, Seonggil Heo, Kurt Ronse, Chan Hwang

Proceedings Volume 13215, 132150N (2024) https://doi.org/10.1117/12.3034701

KEYWORDS: Optical lithography, Extreme ultraviolet, Directed self assembly, Sustainability, Stochastic processes, Phase shifts, Materials processing, Lithography, Extreme ultraviolet lithography, Design

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Proceedings Article | 10 April 2024 Paper

EUV source pole control for LCDU and CD ellipticity handling in hexagonal contact arrays

Jieun Song, Janghun Kim, Hyung Jong Bae, Sudeok Kim, Soonmok Ha, Woojin Jung, Seokwon Cho, Jeounghun Park, Dohyeon Park, Eunji Lee, Minseung Song, Hyunseung Ha, Giseon Han, Young Joo Choi, Gyeongseok Park, Seongbo Shim, Chan Hwang

Proceedings Volume 12953, 1295309 (2024) https://doi.org/10.1117/12.3010718

KEYWORDS: Extreme ultraviolet, Mirrors, Light sources and illumination, Semiconducting wafers, Simulations, Nanoimprint lithography, Metrology, Critical dimension metrology, Source mask optimization, Phase shifts

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