Dr. Iason Giannopoulos Profile

Dr. Iason Giannopoulos

at Paul Scherrer Institut

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

EUV lithography reaches 5 nm half-pitch

Iason Giannopoulos, Iacopo Mochi, Michaela Vockenhuber, Yasin Ekinci, Dimitrios Kazazis

Proceedings Volume PC12953, PC129530P (2024) https://doi.org/10.1117/12.3010388

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Mirrors, Electron beam lithography, Diffraction gratings, Diffraction, Photoresist materials, Lithography, Synchrotrons, Reflection

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Proceedings Article | 30 April 2023 Presentation

Mirror-based EUV interference lithography: one step closer to the ultimate resolution

Iason Giannopoulos, Iacopo Mochi, Michaela Vockenhuber, Yasin Ekinci, Dimitrios Kazazis

Proceedings Volume PC12494, PC1249406 (2023) https://doi.org/10.1117/12.2658011

KEYWORDS: Lithography, Extreme ultraviolet, Diffraction gratings, Extreme ultraviolet lithography, Optical lithography, Mirrors, Photoresist materials, Nanostructures, Synchrotrons, Nanofabrication

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