This paper presents an evaluation of e-beam assisted deposition and welding of conductive
carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements.
Variations in CNT tip conductivity and contact resistance during fabrication were determined as
a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to
measure 2D dopant concentration as a function of annealing conditions in BF2-implanted
samples.
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