A major challenge in thermal analysis at the nanoscale for semiconductor materials lies in determining the mass of the sample. Samples for nanocalorimetry are usually deposited directly onto the chip sensor, but the mass and density of these thin films is hard to quantify. In this work, laser doppler vibrometry is used to measure the complex modes of the nanocalorimetry chip sensor membrane. The sample produces a frequency shift in a selected mode, which can be measured using a simple non-contact optical method.
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