Dr. Jean-Francois Veyan Profile

Dr. Jean-Francois Veyan

at Univ of Texas at Dallas

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Author

Publications (6)

Proceedings Article | 9 April 2024 Presentation + Paper

Understanding the stability of advanced inorganic-organic hybrid thin films for advanced resist applications

Dan Le, Thi Thu Huong Chu, Jin-Hyun Kim, Jean-Francois Veyan, Won-Il Lee, Nikhil Tiwale, Minjong Lee, Seungsoo Choi, Jihoon Woo, Chang-Yong Nam, Rino Choi, Jiyoung Kim

Proceedings Volume 12957, 129570B (2024) https://doi.org/10.1117/12.3010970

KEYWORDS: Thin films, Film thickness, X-ray photoelectron spectroscopy, Atomic layer deposition, Chemical analysis, Aluminum, Carbon monoxide, Materials science, Extreme ultraviolet lithography, Engineering

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Proceedings Article | 1 December 2022 Presentation + Paper

Chemical reactions induced by low-energy electron exposure on a novel inorganic-organic hybrid dry EUV photoresist deposited by molecular atomic layer deposition (MALD)

Dan Le, Su Min Hwang, Jihoon Woo, Seungsoo Choi, Taehee Park, Jean-Francois Veyan, Nikhil Tiwale, Ashwanth Subramanian, Won-Il Lee, Chang-Yong Nam, Rino Choi, Jiyoung Kim

Proceedings Volume 12292, 1229205 (2022) https://doi.org/10.1117/12.2641647

KEYWORDS: Thin films, Extreme ultraviolet lithography, Electron beam lithography, FT-IR spectroscopy, Photoresist materials, Chemical reactions, Floods, Atomic layer deposition, Chemical analysis, Thin film deposition

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Proceedings Article | 30 September 2021 Poster + Presentation

Photochemical study of metal infiltrated e-beam resist using vapor-phase infiltration for EUV applications

Su Min Hwang, Aditya Raja Gummadavelly, Dan Le, Yong Chan Jung, Jean-Francois Veyan, Nikhill Tiwale, Chang-Yong Nam, Jinho Ahn, Jiyoung Kim

Proceedings Volume 11854, 118541C (2021) https://doi.org/10.1117/12.2601033

KEYWORDS: Extreme ultraviolet, Metals, Atomic layer deposition, Polymethylmethacrylate, Photoresist processing, FT-IR spectroscopy, Extreme ultraviolet lithography, Silicon, Resistance, Printed circuit board testing

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Proceedings Article | 9 March 2020 Presentation

Nitrogen sensor based on quantum cascade lasers (QCLs) for wastewater treatment process control and optimization (Conference Presentation)

Katy Roodenko, D. Hinojos, K. Hodges, B.-J. Pandey, J.-F. Veyan, K. P. Clark, D. I. Robbins

Proceedings Volume 11233, 112330C (2020) https://doi.org/10.1117/12.2553691

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Proceedings Article | 31 January 2020 Presentation + Paper

IR-SNOM on a fork: infrared scanning near-field optical microscopy for thermal profiling of quantum cascade lasers

B.-J. Pandey, K. P. Clark, F. Abbas, E. Fuchs, K. Lascola, Yamac Dikmelik, D. Hinojos, K. Hodges, D. Robbins, M. Platkov, A. Katzir, A. Suliman, G. Spingarn, A. Niguès, J.-F. Veyan, Q. Gu, K. Roodenko

Proceedings Volume 11288, 112881Q (2020) https://doi.org/10.1117/12.2543849

KEYWORDS: Thermography, Quantum cascade lasers, Near field scanning optical microscopy, Spatial resolution, Temperature metrology, Infrared imaging, Infrared radiation, Modulation, Near field

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Proceedings Article | 27 February 2019 Presentation + Paper

Non-dispersive infrared (NDIR) sensor for real-time nitrate monitoring in wastewater treatment

K. Roodenko, D. Hinojos, K. Hodges, J.-F. Veyan, Y. Chabal, K. Clark, A. Katzir, D. Robbins

Proceedings Volume 10872, 108720G (2019) https://doi.org/10.1117/12.2506550

KEYWORDS: Infrared radiation, Nitrogen, Absorption, Infrared sensors, Sensors, Infrared technology, Calibration, Absorbance, Water, Spectroscopy, Quantum cascade lasers

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Showing 5 of 6 publications

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