Dr. Jaewan Hong Profile

Dr. Jaewan Hong

at Inha Univ

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Publications (1)

Proceedings Article | 10 May 2005 Paper

Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

B. Park, K. Jung, J. Hong, W. Song, B.-h. O, J. Kim

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599245

KEYWORDS: Atomic force microscopy, Carbon nanotubes, Scanning electron microscopy, Ion beams, Atomic force microscope, Ions, Silicon, Critical dimension metrology, Metrology, Image processing

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