Mr. James S. Hudzik Profile

James S. Hudzik

Product Marketing Manager at Entegris Inc

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Publications (2)

Proceedings Article | 28 August 2003 Paper

Laser pattern generator challenges in airborne molecular contamination protection

Mats Ekberg, Per-Uno Skotte, Tomas Utterback, Swaraj Paul, Oleg Kishkovich, James Hudzik

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504260

KEYWORDS: Photomasks, Mask making, Semiconducting wafers, Semiconductors, Climatology, Contamination, Lithography, Airborne laser technology, Manufacturing, Molecular lasers

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Proceedings Article | 1 August 2002 Paper

Molecular contamination control in photomask/reticle manufacturing using chemically amplified resists (CAR) lessons from wafer lithography

James Hudzik, Oleg Kishkovich, John Higley

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476949

KEYWORDS: Contamination, Photomasks, Lithography, Manufacturing, Photoresist materials, Semiconducting wafers, Environmental sensing, Deep ultraviolet, Contamination control, Chemically amplified resists

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