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James R. Kruse
Research Assistant at Zygo Corporation
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Publications (1)
Proceedings Article | 24 March 2009 Paper
Multi-purpose optical profiler for characterization of materials, film stacks, and for absolute topography measurement
X. Colonna de Lega, Martin Fay, Peter de Groot, Boris Kamenev, J. Ryan Kruse, Mitch Haller, Mark Davidson, Lena Miloslavsky, Duncan Mills
Proceedings Volume 7272, 72723Z (2009) https://doi.org/10.1117/12.814629
KEYWORDS: Metrology, Data modeling, Oxides, Microscopes, Reflectivity, Semiconducting wafers, Optical properties, 3D metrology, Polarization, Data storage
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