Dr. James Myers Profile

Dr. James Myers

at imec

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

G. Mirabelli, Y.-P. Tsai, Y.-H. Chang, D. Velenis, R.-H. Kim, J. Myers, L.-Å. Ragnarsson, O. Zografos, G. Hellings

Proceedings Volume 12954, 129540E (2024) https://doi.org/10.1117/12.3010149

KEYWORDS: Semiconductor manufacturing, Back end of line, Logic, Front end of line

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Keywords/Phrases