GaN based microLED technology is particularly interesting for micro-displays for augmented reality. Beyond that, however, many additional applications exploiting the massively parallel nature of optical channels from microLED arrays are of interest. This includes microLED arrays for chip-based lensless microscopy, optogenetics, low power gas sensing, optical neuromorphic computing, high-speed maskless lithography or massively parallel line-of-sight communication in HPC centers (LIFI), replacing optical fibers. In order to drive large numbers of pixels at high frequencies in customized microLED arrays, the integration with a CMOS backplane chip is required.
The talk will mostly focus on chip processing and hybrid integration techniques for microLEDs and the opportunities for GaN based photonic integration in general, and GaN/CMOS integration in particular. First applications of specially designed microLED arrays in the field of optical neuromorphic computing will also be discussed. Test results include pattern recognition of hand-written digits from the MNIST dataset.
In this study we present the novel approach of GaN-based high-contrast grating (HCG) mirrors as highly reflective top mirrors in GaN vertical-(external)-cavity surface-emitting lasers [V(E)CSELs]. These mirrors can well be integrated into a conventional process flow for GaN-based VECSEL devices – in contrast to conventional Bragg mirrors. Results of thorough growth experiments performed to reliably fabricate high quality cavity structures with well-defined and fine-tuned optical properties will be reported. The properties of HCG mirrors have been calculated by extensive optical device simulations. Properties of HCG structures have been analyzed experimentally by reflection measurements and results will be discussed with a focus on HCG design, potential material combinations, compatibility with existing process steps in GaN technology and the various ways of integration into VECSEL structures.
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