Dr. Jay P. Daniel Profile

Dr. Jay P. Daniel

Director of Engineering

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 11 August 2021 Presentation + Paper

Rate of change of curvature as metric for optical fabrication difficulty in precision aspheres

Jay Daniel, Michael Orr

Proceedings Volume 11816, 118160A (2021) https://doi.org/10.1117/12.2598031

KEYWORDS: Aspheric lenses, Surface finishing, Optical fabrication, Mirrors, Augmented reality, Polishing, Freeform optics, Optical design, Optics manufacturing, Manufacturing

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Proceedings Article | 22 February 2018 Presentation + Paper

BRDF performance of highly polished Al6061T6 and impact on TMA performance

Katherine Baker, Jay Daniel, Ankit Patel

Proceedings Volume 10528, 1052811 (2018) https://doi.org/10.1117/12.2291531

KEYWORDS: Aluminum, Bidirectional reflectance transmission function, Polishing, Scattering, Surface finishing, Sensors, Visible radiation, Surface roughness

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Proceedings Article | 18 March 2014 Paper

Development of an EUVL collector with infrared radiation suppression

Michael Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Ulrich Mueller, Jay Daniel, Shayna Khatri, Adam Magruder, Steven Grantham, Charles Tarrio, Thomas Lucatorto

Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279

KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

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Proceedings Article | 13 September 2012 Paper

JWST: Tinsley achievements on the largest beryllium polishing project

Jay Daniel, Tony Hull, John Barentine

Proceedings Volume 8450, 845021 (2012) https://doi.org/10.1117/12.926715

KEYWORDS: Mirrors, James Webb Space Telescope, Beryllium, Metrology, Safety, Off axis mirrors, Polishing, Aerospace engineering, Cryogenics, Kinematics

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Proceedings Article | 13 September 2012 Paper

Tinsley proves stress mirror polishing for giant segmented telescopes

Ulrich Müller, Jay Daniel

Proceedings Volume 8450, 845025 (2012) https://doi.org/10.1117/12.926718

KEYWORDS: Polishing, Photovoltaics, Mirrors, Surface finishing, Telescopes, Spherical lenses, Metrology, Manufacturing, Ion beam finishing, Thirty Meter Telescope

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Proceedings Article | 13 September 2012 Paper

ZERODUR for stressed mirror polishing II: improved modeling of the material behavior

Ralf Jedamzik, Clemens Kunisch, Thomas Westerhoff, Ulrich Müller, Jay Daniel

Proceedings Volume 8450, 84504P (2012) https://doi.org/10.1117/12.924989

KEYWORDS: Mirrors, Data modeling, Polishing, Glasses, Mathematical modeling, Ceramics, Temperature metrology, Time metrology, Zerodur, Actuators

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Proceedings Article | 5 August 2010 Paper

Tinsley progress on stress mirror polishing (SMP) for the Thirty Meter Telescope (TMT) primary mirror segments II

Jay Daniel, Ulrich Mueller, Tracy Peters, Stephen Sporer, Tony Hull

Proceedings Volume 7733, 773328 (2010) https://doi.org/10.1117/12.857931

KEYWORDS: Mirrors, Telescopes, Space telescopes, Polishing, Photovoltaics, Neodymium, Optical fabrication, Aspheric lenses, Surface finishing, Thirty Meter Telescope

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Proceedings Article | 5 August 2010 Paper

Successful production of the engineering development unit (EDU) primary mirror segment and flight unit tertiary mirror for JWST

Andrea Arneson, Chris Alongi, Rob Bernier, Ed Boese, Jay Daniel, Lee Dettmann, Robert Garfield, Holger Glatzel, John Kincade, Patrick Johnson, Allen Lee, Adam Magruder, Ankit Patel, Martin Seilonen, Gary Surges, Mark Bergeland, Robert Brown, Benjamin Gallagher, Andrew McKay, Lester Cohen

Proceedings Volume 7731, 77310I (2010) https://doi.org/10.1117/12.858049

KEYWORDS: Mirrors, Phase modulation, James Webb Space Telescope, Metrology, Optical testing, Polishing, Beryllium, Surface finishing, Optical fabrication, Aerospace engineering

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Proceedings Article | 3 August 2010 Paper

Survey of interferometric techniques used to test JWST optical components

H. Philip Stahl, Chris Alongi, Andrea Arneson, Rob Bernier, Bob Brown, Dave Chaney, Glen Cole, Jay Daniel, Lee Dettmann, Ron Eng, Ben Gallagher, Robert Garfield, James Hadaway, Patrick Johnson, Allen Lee, Doug Leviton, Adam Magruder, Michael Messerly, Ankit Patel, Pat Reardon, John Schwenker, Martin Seilonen, Koby Smith, W. Scott Smith

Proceedings Volume 7790, 779002 (2010) https://doi.org/10.1117/12.862234

KEYWORDS: Mirrors, Interferometers, Metrology, James Webb Space Telescope, Optical testing, Computer generated holography, Optical components, Cryogenics, Interferometry, Optical fabrication

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Proceedings Article | 19 July 2010 Paper

Narrow ion-beam figuring: a new tool to address extreme slopes on small surfaces located near telescope pupils

Ulrich Mueller, Jeff Stone, Bridget Peters, Jay Daniel, Thomas Greene, Ruslan Belikov, Olivier Guyon

Proceedings Volume 7739, 77390B (2010) https://doi.org/10.1117/12.857962

KEYWORDS: Ion beams, Beam shaping, Telescopes, Spatial frequencies, Ions, Ion beam finishing, Deformable mirrors, Apodization, Imaging systems, Astronomical telescopes

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Proceedings Article | 24 March 2006 Paper

EUV optical system for the reticle imaging microscope (RIM)

H. Glatzel, J. Daniel, K. Khajehnouri, U. Mueller, T. Roff, J. Rosenbohm, S. Sporer

Proceedings Volume 6151, 615130 (2006) https://doi.org/10.1117/12.677199

KEYWORDS: Mirrors, Extreme ultraviolet, Imaging systems, Microscopes, Surface finishing, Atomic force microscopy, Reticles, Optical coatings, Wavefronts, Polishing

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Proceedings Article | 6 May 2005 Paper

Characterization of prototype optical surfaces and coatings for the EUV reticle imaging microscope

H. Glatzel, J. Daniel, K. Khajehnouri, T. Roff, S. Sporer, S. Wong, M. Kriese, Y. Platonov, J. Rodriguez

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.619290

KEYWORDS: Optical coatings, Reflectivity, Photovoltaics, Extreme ultraviolet, Microscopes, Reticles, Light scattering, Mirrors, Atomic force microscopy, Prototyping

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Proceedings Article | 11 March 2002 Paper

100-nm OPC mask patterning using raster-scan 50-kV pattern generation technology

Frank Abboud, Ki-Ho Baik, Varoujan Chakarian, Damon Cole, Jay Daniel, Robert Dean, Mark Gesley, Robert Naber, Thomas Newman, Frederick Raymond, David Trost, Mark Wiltse, William DeVore

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.491928

KEYWORDS: Photomasks, Optical proximity correction, Raster graphics, Optical lithography, Electron beam lithography, Edge roughness, Lithography, Model-based design, Point spread functions, Photoresist processing

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Proceedings Article | 9 April 2001 Paper

Improved throughput in the ALTA 3000 IC mask writing system

Gregory Valentin, Vishal Garg, Henry Chris Hamaker, Jay Daniel, Daniel Sprenkel

Proceedings Volume 4349, (2001) https://doi.org/10.1117/12.425085

KEYWORDS: Photomasks, Printing, Mirrors, Reticles, Composites, Calibration, Semiconductors, Laser systems engineering, Bragg cells, Modulation

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Proceedings Article | 22 January 2001 Paper

Improved throughput in 0.6-NA laser reticle writers

Gregory Valentin, Henry Chris Hamaker, Jay Daniel, Vishal Garg, Daniel Sprenkel

Proceedings Volume 4186, (2001) https://doi.org/10.1117/12.410724

KEYWORDS: Printing, Composites, Reticles, Photomasks, Semiconductors, Critical dimension metrology, Bragg cells, Modulation, Edge roughness, Laser development

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Proceedings Article | 23 November 1999 Paper

Progress in the development of three-aspherical mirror optics for EUVL

Hiroo Kinoshita, Takeo Watanabe, Daniel Bajuk, Jay Daniel, Yachiyo Kimpara, Michael Kriese, Yuriy Platonov

Proceedings Volume 3767, (1999) https://doi.org/10.1117/12.371114

KEYWORDS: Mirrors, Extreme ultraviolet lithography, Multilayers, Reflectivity, Coating, Surface finishing, Polishing, Phase interferometry, Interferometers, Semiconducting wafers

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Showing 5 of 16 publications

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