Free Electron Laser (FELs) as well as storage-ring-based photon sources have seen an enormous improvement over the past decade regarding stability, brilliance and availability of coherence. To give today`s photon science a benefit from these unique source properties the availability of optical elements of utmost quality is essential. However, their supply is very limited because due to the lack of sufficient manufacturing capacity at companies as well as at laboratories world-wide. Only a few companies are technological skilled to supply mirror or grating substrates of sub-nm quality regarding figure- and finish-error on a sufficient length of aperture. Even more critical is the situation for diffractive optical elements such as gratings or reflection zone plates. Especially gratings of blazed groove-profile are provided by very few manufacturers only with extremely long delivery time and high risk of failure during manufacturing. In this presentation we will report on the current state of quality achieved for different type of X-ray-optical elements like mirrors of different size and geometry as well as gratings, of laminar or blazed groove profile. Further consideration will be given to new developments on the production of blazed gratings like new ruling machines to provide gratings of significant larger aperture size as well as the option to obtain blazed gratings by means of e-beam lithography. In addition we report on the methods to verify their quality by means of ex-situ and at-wave-length metrology during manufacturing and for final acceptance test at facility side.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.