Ms. Jennifer Shumway Profile

Jennifer Shumway

Senior Design Engineer at ASML Netherlands BV

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 20 March 2020 Paper

On-product focus monitoring and control for immersion lithography in 3D-NAND manufacturing

Amine Lakcher, Ahmed Zayed, Jennifer Shumway, Jan-Pieter van Delft, Gratiela Isai, Ruxandra Mustata, Arno van den Brink, Taeddy Kim, Jay Jung, Yong-Sik Shin, Soo-Kyung Lee, Paul Böcker, Mohamed El Kodadi, Geert Vinken, ChanHa Park, Sangjun Han, Jeongsu Park, Beomki Shin, Gunwoong Lee

Proceedings Volume 11325, 1132521 (2020) https://doi.org/10.1117/12.2552930

KEYWORDS: Semiconducting wafers, Metrology, Scanners, Immersion lithography, Critical dimension metrology, Lithography, Lithographic process control

Read Abstract +

Proceedings Article | 22 January 2018 Presentation + Paper

Reduction and control of intrafield focus variation on 7nm technology

Jennifer Shumway, Nathan Neal, Sheldon Meyers, Jens Reichelt, Young Ki Kim, Justin Hanson, Ferhad Kamalizadeh, Dionysios Petromanolakis, Youri van Dommelen, Robert Bonanni, Arjan Gijsbertsen

Proceedings Volume 10147, 101470B (2018) https://doi.org/10.1117/12.2258391

KEYWORDS: Optical lithography, Current controlled current source, Calibration, Scanners, Reticles, Monochromatic aberrations, Software development, Semiconducting wafers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years