The InSb epitaxial layer of p+-n-n+ structure was grown by Molecular Beam Epitaxy (MBE) on a heavily doped InSb substrate. Photodiodes of InSb were fabricated by standard semiconductor manufacturing process. Measurement and analysis of its electrical properties was carried out. Compared with traditional bulk crystal InSb of p+-n structure, we find that, when the external bias voltage is 0.1V, dark current density values of p+-n-n+ InSb device and InSb bulk material device is 1.1×10-6 A·cm-2 and 9.5×10-5 A·cm-2 at 77K, respectively. zero-bias-resistance area products is 8.9×104Ω·cm2 and 6.2×103 Ω·cm2 at 77K, respectively. Doping concentrations values in the absorption layers are equal to 5.0×1014 cm-3 and 1.3×1016 cm-3 , respectively. The InSb epitaxial layer of p+-n-n+ structure which has better crystal quality achieves better performance than bulk crystal InSb when the passivation process is reliable. It provides an important foundation for the fabrication of epitaxial InSb infrared detector.
With the development of technology, the demand for semiconductor ultraviolet detector is
increasing day by day. Compared with the traditional infrared detector in missile guidance,
ultraviolet/infrared dual-color detection can significantly improve the anti-interference ability of the
missile. According to the need of missile guidance and other areas of the application of ultraviolet
detector, the paper introduces a manufacture of the CdS Schottky barrier ultraviolet detector. By using
the radio frequency magnetron sputtering technology, a Pt thin film layer is sputtered on CdS basement
to form a Schottky contact firstly. Then the indium ohmic contact electrode is fabricated by thermal
evaporation method, and eventually a Pt/CdS/In Schottky diode is formed. The I-V characteristic of the
device was tested at room temperature, its zero bias current and open circuit voltage is -0.578nA and
130mV, respectively. Test results show that the the Schottky contact has been formed between Pt and
CdS. The device has good rectifying characteristics. According to the thermionic emission theory, the
I-V curve fitting analysis of the device was studied under the condition of small voltage. The ideality
factor and Schottky barrier height is 1.89 and 0.61eV, respectively. The normalized spectral
responsivity at zero bias has been tested. The device has peak responsivity at 500nm, and it cutoff at
510nm.
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