Dr. Jianghui Liu Profile

Dr. Jianghui Liu

at Institute of Optics and Electronics CAS

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 6 February 2019 Paper

Jianghui Liu, Junbo Liu, Qingyuan Deng, Yan Tang, Song Hu

Proceedings Volume 10842, 108421B (2019) https://doi.org/10.1117/12.2505369

KEYWORDS: Optical lithography, Photomasks, Digital micromirror devices, Microlens, Micromirrors

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Keywords/Phrases