In recent years, the superior optical properties of complex aspherical elements have provided optical designers with greater flexibility, leading to an explosive growth in demand across various applications. High-precision and reliable profile measurement technology is crucial for ensuring the quality of aspherical processing and the proper functioning of optical systems. To achieve high-precision, traceable measurements of complex aspherical mirror surfaces, a non-contact coordinate scanning measurement equipment based on an independent metrological loop is proposed. This equipment incorporates a dedicated metrology frame and utilizes multiple interferometric systems for real-time, accurate measurements of aspheric surfaces, ensuring the results are traceable to the SI definition of the meter. Specifically, the equipment features three co-referenced interferometric systems: two for real-time tracking of the optical probe's spatial position, and the third integrated within the miniature interferometric probe for measuring the surface shape of complex aspherical mirrors. The measurement principles of the interferometric systems are explained in detail. Each interferometric system utilizes a highly integrated waveplate-array quadrant photodetector to minimize optical components, mitigate processing and installation errors, significantly reduce system volume and mass, and decrease equipment load. Partial surfaces of standard spheres and aspherical mirrors were tested. The results showed a measurement error of less than 0.2 μm and the repeatability of 70 nm, achieving sub-micron accuracy.
With the development of ultra-precision equipment, the roughness of contact surface can reach the nanometer level, and the surface morphology has a significant impact on surface contact, friction, wear and lubrication. At present, the surface morphology description is mainly based on the measurement, which is scale dependent, and the statistical parameters obtained by different sampling length and measurement resolution are different, so it is impossible to realize the accurate characterization of nanoscale rough surface. Because the rough surface is self-affine, another method can be introduced to characterize the rough morphology, fractal theory. The simulated rough surface has the advantage that it is not limited by the sampling length, and can realize the unique characterization of the rough surface. In this study, a nanoscale anisotropic three-dimensional fractal surface is established based on W-M model, and the relationships between fractal dimension D, roughness coefficient G, contour arithmetic mean deviation Sa and contour height standard deviation Sq are studied based on statistical principle. Finally, it is determined that the key parameter for the characterization of nanoscale rough morphology is the roughness coefficient G
Line-structured light sensor is a three-dimensional measurement method which combines the advantage of high precision and speed, applicable in many fields. The mathematical model of line-structured light sensor is an essential foundation which determines measurement precision. Through the comparison of the three representative models which are deduced from different starting points and analysis of the model constraint conditions, we build a uniform and flexible model which shows the common characteristics and connections of the previous models and combines the flexibility and clear geometric meanings of the structured parameters with a correctable constraint condition. It is suitable to most conditions and structured parameters design of line-structured light sensor.
Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.
KEYWORDS: Control systems, Solids, Sensors, Data acquisition, Control systems design, Space operations, Motion controllers, Instrumentation engineering, Coating, Motion measurement
The lubricating mechanism and improved performances of MoS2 film in bearings is analyzed in this paper. In order to improve the performance of solid lubricated bearings, the running-in is necssary. The design of the running-in system which can change the bearing preload during the process of running-in is introduced in detail. The results of the running-in experiments are analyzed.
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