Mr. Jiashen Wei Profile

Jiashen Wei

at Institute of Bioengineering and Nanotechnology

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Publications (3)

Proceedings Article | 5 January 2009 Paper

Low-stress PECVD amorphous silicon carbide (α-SiC) layers for biomedical application

Jiashen Wei, Bangtao Chen, Daniel Poenar, Yong Yeow Lee, Ciprian Iliescu

Proceedings Volume 7269, 72690C (2009) https://doi.org/10.1117/12.810883

KEYWORDS: Plasma enhanced chemical vapor deposition, Silicon carbide, Silicon, Semiconducting wafers, Refractive index, Biomedical optics, Etching, Ions, Crystals, Amorphous silicon

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Proceedings Article | 30 December 2008 Paper

Microneedles array with biodegradable tips for transdermal drug delivery

Ciprian Iliescu, Bangtao Chen, Jiashen Wei, Francis Tay

Proceedings Volume 7270, 72700M (2008) https://doi.org/10.1117/12.810692

KEYWORDS: Skin, Silicon, Photoresist materials, Reactive ion etching, Diffusion, In vitro testing, Photomasks, Deep reactive ion etching, Etching, Scanning electron microscopy

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Proceedings Article | 20 December 2006 Open Access

Low-stress silicon nitride layers for MEMS applications

Ciprian Iliescu, Jiashen Wei, Bangtao Chen, Poh Lam Ong, Francis E. Tay

Proceedings Volume 6415, 64150L (2006) https://doi.org/10.1117/12.696350

KEYWORDS: Silicon, Plasma, Semiconducting wafers, Stem cells, Plasma enhanced chemical vapor deposition, Gases, Etching, Microelectromechanical systems, Wet etching, Ions

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