In order to suppress the polishing defects of single crystal silicon optical elements, the material removal mechanism and defect suppression technology in the polishing process of single crystal silicon were carried out. Based on the nanoindentation test, the mechanical properties of single crystal silicon were analyzed. Based on the X-ray photoelectron spectroscopy (XPS) test, the chemical element on the processed surface was studied, and then the chemical-mechanical coordinated removal mechanism in the polishing of single crystal silicon was analyzed. Then, this paper carried out the research on the bonnet polishing process of single crystal silicon optical elements. According to the experimental results, the influence of slurry characteristics on the removal efficiency and defects had been obtained, and an efficient processing method by bonnet polishing for obtaining high quality single crystal silicon elements was mastered.
Small scale waviness of aspheric surface inevitably occurs when grinding aspheric surface with grating parallel grinding technology, so aiming at the problem of waviness amplitude and uniformity, this paper theoretically analyses the relationship between grinding processing parameters and aspheric waviness, and designs a single factor experiment to verify the influence of grinding processing parameters on aspheric surface waviness. The processing parameters are determined to minimize the waviness amplitude. Considering the problem of uniformity of waviness, according to the influence of grinding force on uniformity of aspheric waviness in grinding process, down-grinding grating parallel grinding method and up-grinding grating parallel grinding method are used. Experiments verify that down-grinding grating parallel grinding method is the best method to get most uniformity small-scale waviness of aspheric surface. The minimum amplitude is 0.5μm~1.5μm.
In order to improve the overall efficiency of machining and the defect quality of large aperture fused silica optics, it’s necessary to strictly control the crack defects and their depth uniformity in the first grinding process. Firstly, the morphology of three typical defects affecting the uniformity of crack depth was analyzed, which were scattered superficial sand holes, continuous linear defects and dotted linear defects. Then according to the morphology, the causes were investigated and the control techniques were proposed. The scattered superficial sand holes were caused by the large size glass powder, the diamond particles dropped from the grinding wheel and other foreign body impurities in the grinding fluid, which had been squeezed into the surface of the element by the grinding wheel. Through the clean filtration of grinding fluid, the quantity of such defects could be effectively reduced. The continuous linear defects were caused by stress concentration at the two sharp edges of the grinding wheel. Arcing the two sides of wheel could reduce the machining stress at the edges and avoid the occurrence of continuous linear defects. The dotted linear defects were caused by the stress concentration of the grooves on the surface of the wheel during grinding. After optimizing the dressing parameters to reduce the dressing force and avoid the grains of dressing wheel being embedded into the grinding wheel surface, all the grooves on the wheel surface and all the dashed line defects on the element surface disappeared practically. At the last, after integrating all the above control techniques, the grinding experiment of large scale fused silica optics was carried out. The scattered superficial sand holes, continuous linear defects and dotted linear defects on the surface of element after grinding were obviously alleviated. The crack depth of the whole aperture was between 4μm and 7μm. All the results indicated that the control techniques were efficacious.
Magnetorheological finishing (MRF) is a deterministic optical element polishing method that achieves material removal by means of the sheared and rheo-logical behavior of magnetorheological fluids. To realize high precision fabrication of large-aperture optical components, MRF technology had been explored in this paper. The main factors affecting the removal efficiency were investigated by orthogonal experiment. It indicated that the influence of the immersion depth and the thickness of ribbon on removal efficiency was more remarkable than the other parameters. The process of MRF machining component is established. Finally, the 590mm × 400mm plane optical element are manufactured using the MRF, and the result are very good.
Magnetorheological finishing (MRF) is a deterministic optical element polishing method that achieves material removal by means of the sheared and rheo-logical behavior of magnetorheological fluids. For the magnetorheological processing optics, an experimental study of the magnetorheological processing force was carried out. It was obtained that the relationship between the process parameters and element forces in magnetorheological polishing .The process parameters in MRF are the rotation speed of the polishing wheel, the magnetic field strength, the liquid flow rate, and the immersion depth. For MRF-600 magnetorheological polishing machine with polishing wheel Φ300mm, the normal forces range from 2N to 32N.According to the fitting curve between the magnetic field and the normal forces, the force is 6 times larger than that under the zero magnetic field condition. At the same time, the polished spots were collected under different magnetic field intensity. The law of the removal rate of polishing spots was obtained.
Bonnet polishing has the advantage of high removal efficiency and is widely used in aspheric manufacturing process. However, it is difficult to avoid the mid-spatial-frequency (MSF) error in the process of high efficiency bonnet polishing. Consequently, the paper established the precession simulation model of bonnet polishing, aiming to reveal the effect of precession mode on the surface error, and obtain the optimal precession mode to restrain the MSF error. The three precession modes, i.e., single-step precession, multi-step precession and continuous precession, were compared in simulation analysis and verified through the practical polishing experiments. The experimental results exhibited a good agreement with the theoretical results, which verified the correctness of the proposed model. The results shown that the optimal multi-step precession mode can not only restrain the MSF error, but also obtain better surface roughness. The paper demonstrated the validity of the multi-step precession polishing, which laid the foundation for the high-efficiency and high-precision manufacturing of large-aperture optical components.
Based on the theoretical removal function model, the internal relation between the fluid dynamic pressure parameters and the processing parameters of the magnetorheological removal function is analyzed. The main technological parameters affecting the removal function are clarified. The single-factor influence experiment was carried out for four technological parameters (liquid flow, concentration of polishing liquid, immersion depth and thickness of ribbon).The relationship curve between the single factor parameter and the removal function volume and the single factor parameter and the removal area is given. The influence of different single-factor parameters on magnetorheological removal function is obtained. The processing of a concave mirror is guided by this rule. High quality optical elements are obtained.
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