Dr. Jin Yu Profile

Dr. Jin Yu

at United Microelectronics Corp

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Author

Publications (3)

Proceedings Article | 15 March 2006 Paper

Advanced exposure and focus control by proximity profile signature matching

Wenzhan Zhou, Alex See, Jin Yu

Proceedings Volume 6155, 61550H (2006) https://doi.org/10.1117/12.650425

KEYWORDS: Critical dimension metrology, Data modeling, Scanners, Cadmium, Finite element methods, Process control, Semiconducting wafers, Control systems, Photoresist materials, Scatterometry

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Proceedings Article | 12 May 2005 Paper

Proximity matching for 193 nm scanner using scatterometry

WenZhan Zhou, Jin Yu, James Lo, Johnson Liu, Henry Tjhin, Thaddeus Dziura

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.601574

KEYWORDS: Single crystal X-ray diffraction, Scanners, Scatterometry, Optical proximity correction, Data modeling, Diffusion, Photoresist processing, Optical lithography, Spectroscopy, Physics

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Proceedings Article | 24 May 2004 Paper

Lithography process window analysis with calibrated model

Wenzhan Zhou, Jin Yu, James Lo, Johnson Liu

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.532719

KEYWORDS: Calibration, Lithography, Error analysis, Data modeling, Process control, Metrology, Critical dimension metrology, Optical lithography, Finite element methods, Photoresist materials

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