Jing-Wei Shih
at Synopsys Taiwan Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 November 2024 Presentation + Paper
Proceedings Volume 13216, 132161M (2024) https://doi.org/10.1117/12.3034652
KEYWORDS: Contour modeling, Optical proximity correction, Distance measurement, Shape analysis, Error analysis, Target recognition, Mask making, Smoothing

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