Ms. Jing Li Profile

Jing Li

at Nanyang Tech Univ

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Author

Publications (3)

Proceedings Article | 3 October 2003 Paper

MEMS deep-RIE fabrication process and device characterization

Jing Li, Qing Xin Zhang, Anand Krishna Asundi, Ai Qun Liu

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500343

KEYWORDS: Etching, Oxides, Silicon, Reactive ion etching, Optical switching, Microelectromechanical systems, Deep reactive ion etching, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Anisotropic etching

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Proceedings Article | 3 September 2002 Paper

Hybrid reconfigurable OADM using MEMS switch and FBG

Jing Li, Ai Liu, Q.X Zhang, N. Balasubramanian, C. Lu

Proceedings Volume 4907, (2002) https://doi.org/10.1117/12.482274

KEYWORDS: Fiber Bragg gratings, Switches, Microelectromechanical systems, Optical switching, Micromirrors, Signal attenuation, Metals, Switching, Silicon, Thermal effects

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Proceedings Article | 19 April 2002 Paper

Application of deep-trench LISA technology on optical switch fabrication

Qingxin Zhang, Jing Li, Yu Bo Miao, Ai Liu

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462886

KEYWORDS: Etching, Oxides, Metals, Silicon, Nanoimprint lithography, Optical switching, Switches, Photomasks, Mirrors, Optical fabrication

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