CONFERENCE PROCEEDINGS
Advanced Search
Jin Hyuk Choi
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 22 November 2023 Poster
Fizeau interferometry for evaluating EUV attenuated phase shift mask
Proceedings Volume PC12750, PC127500S (2023) https://doi.org/10.1117/12.2687429
KEYWORDS: Phase shifts, Extreme ultraviolet, Refractive index, Interferometers, EUV optics, Ruthenium, Flat optics, Thin films, Film thickness, Optical coherence
Proceedings Article | 21 November 2023 Poster + Paper
Experimental investigation of the mask diffraction light blocking with critical-sized Sn particles on the EUV pellicle
Proceedings Volume 12750, 127500Z (2023) https://doi.org/10.1117/12.2687444
KEYWORDS: Diffraction, Particles, Pellicles, Tin, Extreme ultraviolet, Deformation, Image restoration, Extreme ultraviolet lithography, Lithography, Imaging systems
Proceedings Article | 14 April 2023 Poster
Effect of pellicle wrinkles on EUV reflectivity and local critical dimension
Proceedings Volume PC12494, PC124940F (2023) https://doi.org/10.1117/12.2655991
KEYWORDS: Extreme ultraviolet, Pellicles, Reflectivity, Critical dimension metrology, Diffraction, Spatial frequencies, Scanners, Reconstruction algorithms, Optical properties, Microscopes
Proceedings Article | 11 November 2022 Presentation
Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects
Proceedings Volume PC12292, PC122920I (2022) https://doi.org/10.1117/12.2641801
KEYWORDS: Photomasks, Pellicles, Extreme ultraviolet, Diffraction, Reconstruction algorithms, Phase retrieval, Microscopes, Lithographic illumination, Inspection, Image retrieval
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top