Mr. Jinseo Choi Profile

Jinseo Choi

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 5 April 2007 Paper

Novel method of under-etch defect detection for contact layers based on Si substrate using optic wafer inspection tools

Byoung-Ho Lee, Jin-Seo Choi, Soo-Bok Chin, Do-Hyun Cho, Chang-Lyong Song

Proceedings Volume 6518, 651847 (2007) https://doi.org/10.1117/12.710746

KEYWORDS: Wafer inspection, Wafer-level optics, Defect detection, Signal detection, Inspection, Electrons, Silicon, Virtual colonoscopy, Semiconducting wafers, Etching

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Proceedings Article | 10 May 2005 Paper

Methodology and mechanism study on high aspect ratio (HAR) contact bottom image in scanning electron microscopy

H. Kang, J. Lim, J. Choi, T. Lee, B. Lee, S. Chin, D. Cho

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.596832

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Image quality, Sensors, Critical dimension metrology, Electron microscopes, Electron transport, Image analysis, Control systems, Electronics

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