KEYWORDS: Silicon, Liquids, Atomic force microscopy, Isotropic etching, 3D printing, Thermal oxidation, Sputter deposition, Actuators, Reactive ion etching, Silicon films
In this paper, we demonstrate fabrication processes of dual atomic force microscopic (AFM) probe with embedded micro-channels and a nozzle hole for liquid delivering function for 3D printing in nano-scale. The nozzle and embedded micro-channels were successfully fabricated with under-surface connection and hydrophilic inner walls. The narrow trench opening remained above the micro-channel, was completely sealed by combination of Si thermal oxidation and subsequent SiO2 sputtering deposition. Twin Si tips with an outlet nozzle hole and embedded micro-channel were fabricated with the developed fabrication process.
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