Prof. Joan Bausells
Research Professor at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Area of Expertise:
MEMS , Nanofabrication , ISFET , NEMS , CMOS sensors , Nanomechanics
Publications (5)

Proceedings Article | 13 June 2017 Presentation + Paper
Albert Alcacer, Angelos Streklas, Abdoullatif Baraket, Nadia Zine, Abdelhamid Errachid, Joan Bausells
Proceedings Volume 10246, 102460H (2017) https://doi.org/10.1117/12.2266363
KEYWORDS: Biosensors, Gold, Electrodes, Heart, Silver, Silicon, Sensors, Platinum, Lithography

SPIE Journal Paper | 27 July 2015
Jordi Llobet, Marta Gerbolés, Marc Sansa, Joan Bausells, Xavier Borrisé, Francesc Pérez-Murano
JM3, Vol. 14, Issue 03, 031207, (July 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.031207
KEYWORDS: Silicon, Scanning electron microscopy, Wet etching, Ion beams, Ion implantation, Resonators, Etching, Nanolithography, Ions, Nanowires

Proceedings Article | 10 April 2000 Paper
Xavi Marin, Jordi Carrabina, Joan Bausells
Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382310
KEYWORDS: Etching, Microelectromechanical systems, Manufacturing, Tolerancing, Semiconducting wafers, Finite element methods, Standards development, Yield improvement, Electronic design automation, Transistors

Proceedings Article | 23 September 1996 Paper
Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251220
KEYWORDS: Sensors, Silicon, Standards development, Manufacturing, System integration, Infrared sensors, Computer aided design, CMOS technology, Field effect transistors, Anisotropic etching

Proceedings Article | 17 September 1996 Paper
Jordi Carrabina, Joaquin Saiz, David Marin, Xavier Marin, Angel Merlos, Joan Bausells
Proceedings Volume 2882, (1996) https://doi.org/10.1117/12.250717
KEYWORDS: Computer aided design, Microsystems, Sensors, CMOS sensors, Standards development, Etching, CMOS technology, Sensor technology, Solid modeling, Instrument modeling

Conference Committee Involvement (8)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
Showing 5 of 8 Conference Committees
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