Mr. Johannes Dickmann Profile

Johannes Dickmann

at Physikalisch-Technische Bundesanstalt

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Author

Publications (4)

Proceedings Article | 21 June 2019 Open Access

Mueller matrix ellipsometry for enhanced optical form metrology of sub-lambda structures

Tim Käseberg, Johannes Dickmann, Thomas Siefke, Matthias Wurm, Stefanie Kroker, Bernd Bodermann

Proceedings Volume 11057, 110570R (2019) https://doi.org/10.1117/12.2527419

KEYWORDS: Plasmonics, Ellipsometry, Scanning electron microscopy, Numerical simulations, Metrology, Nanostructures, Near field optics

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Proceedings Article | 21 June 2019 Presentation + Paper

Modeling aspects for high precision absorption measurements

Walter Dickmann, Johannes Dickmann, Florian Bruns, Stefanie Kroker

Proceedings Volume 11057, 110570B (2019) https://doi.org/10.1117/12.2525690

KEYWORDS: Absorption, Refractive index, Modulation, Precision measurement, Refraction, Spatial resolution, Photothermal effect

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Proceedings Article | 24 May 2018 Presentation + Paper

Determination of structural deviations in wire grid polarizers for DUV application wavelengths by transmission spectroscopy in the visible spectral range

T. Siefke, W. Dickmann, T. Weichelt, M. Steinert, J. Dickmann, C. B. Rojas Hurtado, B. Bodermann, S. Kroker

Proceedings Volume 10678, 106780O (2018) https://doi.org/10.1117/12.2306026

KEYWORDS: Polarizers, Transmittance, Deep ultraviolet, Double patterning technology, Visible radiation, Ion beams, Etching, Spectroscopy, Chromium, Polarization

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Proceedings Article | 26 June 2017 Paper

Simulation of the influence of line edge roughness on the performance of deep ultraviolet wire grid polarizers

Thomas Siefke, Carol Rojas Hurtado, Johannes Dickmann, Martin Heusinger, Stefanie Kroker

Proceedings Volume 10330, 103300S (2017) https://doi.org/10.1117/12.2269602

KEYWORDS: Refractive index, Finite-difference time-domain method, Tungsten, Ion beams, Etching, Deep ultraviolet, Polarization, Modeling, Line edge roughness, Polarizers, Optical metrology, Polarization control

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