Dr. Johannes Eisenmenger Profile

Dr. Johannes Eisenmenger

at Carl Zeiss SMT GmbH

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Author

Publications (1)

Proceedings Article | 11 December 2009 Paper

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, Oscar Noordman, Robert Kazinczi, Gert Streutker, Bert van Drieenhuizen, Stephen Hsu, Keith Gronlund, Markus Degünther, Dirk Jürgens, Johannes Eisenmenger, Michael Patra, Andras Major

Proceedings Volume 7520, 75200Y (2009) https://doi.org/10.1117/12.837035

KEYWORDS: Mirrors, Fiber optic illuminators, Diffractive optical elements, Source mask optimization, Micromirrors, Light, Metrology, Semiconducting wafers, Switching, Scanners

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