Dr. John H. Burnett Profile

Dr. John H. Burnett

Physicist

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 20 September 2016 Presentation + Paper

Refractive index measurements of Ge

John Burnett, Simon Kaplan, Eric Stover, Adam Phenis

Proceedings Volume 9974, 99740X (2016) https://doi.org/10.1117/12.2237978

KEYWORDS: Germanium, Temperature metrology, Refractive index, Refraction, Refractometry, Prisms, Mirrors, Monochromators, Optical design, Calibration

Read Abstract +

SPIE Journal Paper | 1 April 2009

Index of refraction of high-index lithographic immersion fluids and its variability

Min Yang, Simon Kaplan, Roger French, John Burnett

JM3, Vol. 8, Issue 02, 023005, (April 2009) https://doi.org/10.1117/12.10.1117/1.3124189

KEYWORDS: Refraction, Water, Refractive index, Prisms, Thermal optics, Lithography, Microfluidics, Absorbance, Temperature metrology, Immersion lithography

Read Abstract +

Proceedings Article | 16 March 2009 Paper

Birefringence issues with uniaxial crystals as last lens elements for high-index immersion lithography

John Burnett, Eric Benck, Simon Kaplan, Gabriel Sirat, Chris Mack

Proceedings Volume 7274, 727421 (2009) https://doi.org/10.1117/12.814324

KEYWORDS: Sapphire, Crystals, Birefringence, Polarization, Lithography, Absorption, Anisotropy, Immersion lithography, Lithographic illumination, Double patterning technology

Read Abstract +

Proceedings Article | 27 March 2007 Paper

Immersion lithography with numerical apertures above 2.0 using high index optical materials

Jianming Zhou, Neal Lafferty, Bruce Smith, John Burnett

Proceedings Volume 6520, 65204T (2007) https://doi.org/10.1117/12.712429

KEYWORDS: Photoresist materials, Refractive index, Absorbance, Sapphire, Optical lithography, Aluminum, Interfaces, Birefringence, Lutetium, Prisms

Read Abstract +

Proceedings Article | 15 March 2006 Paper

High-index optical materials for 193nm immersion lithography

John Burnett, Simon Kaplan, Eric Shirley, Deane Horowitz, Wilfried Clauss, Andrew Grenville, Chris Van Peski

Proceedings Volume 6154, 615418 (2006) https://doi.org/10.1117/12.656901

KEYWORDS: Garnet, Spinel, Crystals, Ceramics, Aluminum, Germanium, Oxides, Lutetium, Magnesium, Optical properties

Read Abstract +

Proceedings Article | 12 May 2005 Paper

High refractive index immersion fluids for 193 nm immersion lithography

Bridgette Budhlall, Gene Parris, Peng Zhang, Xiaoping Gao, Zarka Zarkov, Brenda Ross, Simon Kaplan, John Burnett

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600025

KEYWORDS: Refractive index, Absorbance, Water, Photoresist materials, Immersion lithography, Absorption, Microfluidics, Ultraviolet radiation, Semiconducting wafers, Fluid dynamics

Read Abstract +

Proceedings Article | 12 May 2005 Paper

High-index materials for 193 nm immersion lithography

John Burnett, Simon Kaplan, Eric Shirley, Paul Tompkins, James Webb

Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600109

KEYWORDS: Birefringence, Spinel, Crystals, Transmittance, Oxides, Absorption, Immersion lithography, Water, Ultraviolet radiation, Ceramics

Read Abstract +

Proceedings Article | 28 May 2004 Paper

Immersion fluid refractive indices using prism minimum deviation techniques

Roger French, Min Yang, Michael Lemon, Ron Synowicki, Greg Pribil, Gerald Cooney, Craig Herzinger, Steven Green, John Burnett, Simon Kaplan

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537727

KEYWORDS: Prisms, Refractive index, Liquids, Vacuum ultraviolet, Water, Thermal optics, Refraction, Immersion lithography, Nitrogen, Environmental sensing

Read Abstract +

SPIE Journal Paper | 1 January 2004

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

JM3, Vol. 3, Issue 01, (January 2004) https://doi.org/10.1117/12.10.1117/1.1632501

KEYWORDS: Water, Prisms, Refractive index, Thermal optics, Interferometry, Ultraviolet radiation, Refraction, Silica, Fabry–Perot interferometers, Immersion lithography

Read Abstract +

Proceedings Article | 26 June 2003 Paper

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John Burnett, Simon Kaplan

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.504601

KEYWORDS: Water, Prisms, Thermal optics, Refractive index, Microfluidics, Refraction, Fabry–Perot interferometers, Mirrors, Temperature metrology, Ultraviolet radiation

Read Abstract +

SPIE Journal Paper | 1 October 2002

Symmetry of spatial-dispersion-induced birefringence and its implications for CaF₂ ultraviolet optics

John Burnett, Zachary Levine, Eric Shirley, John Bruning

JM3, Vol. 1, Issue 03, (October 2002) https://doi.org/10.1117/12.10.1117/1.1503350

KEYWORDS: Birefringence, Crystals, Anisotropy, Polarization, Dielectrics, Wave propagation, Lithography, Ultraviolet radiation, UV optics, Refraction

Read Abstract +

Proceedings Article | 5 July 2000 Paper

Absolute index of refraction and its temperature dependence of calcium fluoride, barium fluoride, and strontium fluoride near 157 nm

John Burnett, Rajeev Gupta, Ulf Griesmann

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388989

KEYWORDS: Calcium, Refraction, Temperature metrology, Spectroscopy, Barium, Prisms, Visible radiation, Strontium, Refractive index, Vacuum ultraviolet

Read Abstract +

Proceedings Article | 28 September 1999 Paper

NIST FT700 Vacuum Ultraviolet Fourier Transform Spectrometer: applications in ultraviolet spectrometry and radiometry

Ulf Griesmann, Rainier Kling, John Burnett, Lukasz Bratasz

Proceedings Volume 3818, (1999) https://doi.org/10.1117/12.364153

KEYWORDS: Spectroscopy, Fourier transforms, Lamps, Ultraviolet radiation, Vacuum ultraviolet, Argon, Spectral resolution, Interferometers, Data acquisition, Calibration

Read Abstract +

Proceedings Article | 26 July 1999 Paper

Index of refraction and its temperature dependence of calcium fluoride near 157 nm

John Burnett, Rajeev Gupta, Ulf Griesmann, Ted Jou

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354324

KEYWORDS: Temperature metrology, Calcium, Refraction, Prisms, Spectroscopy, Lamps, Refractive index, Vacuum ultraviolet, Lens design, Optical lithography

Read Abstract +

Proceedings Article | 8 October 1998 Paper

Measurements of index of refraction in the deep and vacuum ultraviolet using the minimum-deviation method

John Burnett, Rajeev Gupta, Ulf Griesmann

Proceedings Volume 3425, (1998) https://doi.org/10.1117/12.326665

KEYWORDS: Refractive index, Silica, Calcium, Spectrometers, Temperature metrology, Vacuum ultraviolet, Deep ultraviolet, Prisms, Refraction, Oxygen

Read Abstract +

Showing 5 of 15 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years