Pedro Ortiz, Neil Keegan, Julia Spoors, John Hedley, Alun Harris, Jim Burdess, Richard Burnett, Thomas Velten, Margit Biehl, Thorsten Knoll, Werner Haberer, Matthew Solomon, Andrew Campitelli, Calum McNeil
A microfluidic system for cancer diagnostics based around a core MEMS biosensor technology is presented in this
paper. The principle of the MEMS biosensor is introduced and the functionalisation strategy for cancer marker
recognition is described. In addition, the successful packaging and integration of functional MEMS biosensor devices are
reported herein. This ongoing work represents one of the first hybrid systems to integrate a PCB packaged silicon
MEMS device into a disposable microfluidic cartridge.
We present a sophisticated method for the packaging of a micro-electro-mechanical biochip, which leaves the sensitive
surface area of the chip uncovered to allow for direct contact to aqueous environment. Together with adequate
integration in a fluidic cartridge, the packaging method allows for the realization of a lab-on-chip (LOC). A fluidic
interface to the cartridge is provided as well as electrical interfaces to the biochip electronics located in a readout
instrument. The biochip features a central membrane and electrodes, both located in the central chip area, and bond pads
distributed along the rim of the chip. The packaging method ensures a hermetic separation between the membrane
sensing area interfaced to liquids and the bond pad area. Challenging was the fact that both, the freely moving membrane
and the bond pads for electrical interconnection are positioned very close to each other on the same chip surface area.
We mounted the biochip into a recess of a rigid printed circuit board and electrically connected it to the latter with a
proprietary MicroFlex Interconnection (MFI) technology. A customized coating method using a specially shaped silicone
casting-mold ensured a very thin, hermetic encapsulation, which left the membrane safe and freely accessible.
Pedro Ortiz, Neil Keegan, Julia Spoors, John Hedley, Alun Harris, Jim Burdess, Richard Burnett, Thomas Velten, Margit Biehl, Thorsten Knoll, Werner Haberer, Matthew Solomon, Andrew Campitelli, Calum McNeil
A microfluidic system for cancer diagnosis based around a core MEMS biosensor technology is presented in this
paper. The principle of the MEMS biosensor is introduced and the functionalisation strategy for cancer marker
recognition is described. In addition, the successful packaging and integration of functional MEMS biosensor devices are
reported herein. This ongoing work represents one of the first hybrid systems to integrate a PCB packaged silicon
MEMS device into a disposable microfluidic cartridge.
An optical workstation consisting of a surface profiler, laser vibrometer and a high power pulsed laser has been constructed for mechanical testing of MEMS. Through a series of static and dynamic measurements, the performance of a device is determined in seconds. For these measurements the device is induced to move by either using mechanical, electrostatic or optical actuation methods. In the latter case this is achieved by directing high power light pulses onto a silicon surface. The same laser can also be used to trim and frequency tune resonant devices. The workstation has been designed to incorporate single devices, wafers and packaged devices so that devices may be characterised at any stage of processing. The speed and non-contact nature of this workstation makes it suitable for industrial metrology. A variety of MEMS have been characterised, examples of which are presented. The workstation has also proved to be an invaluable tool for determining the cause of device failure in prototype designs.
A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer; the other methods are being explored.
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