Monoclinic β-Ga2O3 nanowires were fabricated using chemical vapor deposition and doped with nitrogen using remote plasma. The monoclinic phase and high crystallinity of the nanowires were confirmed by XRD and TEM, while nitrogen incorporation into the nanowires was confirmed by X-ray absorption and Raman spectroscopies. Temperature-resolved cathodoluminescence characterisation revealed a green luminescence band at 2.5 eV due to the N incorporation. The UV emission at 3.4 eV associated with self-trapped holes and its temperature-dependant behaviour were found to be identical for the undoped and N-doped nanowires. The experimental findings will be discussed in context of theoretical calculations for N-doped Ga2O3.
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