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Jonathan S. Custer
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 16 January 2003 Paper
MEMS packaging efforts at Sandia National Laboratories
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476331
KEYWORDS: Microelectromechanical systems, Packaging, Microsystems, Microfluidics, Vertical cavity surface emitting lasers, Semiconducting wafers, Particles, Glasses, Reliability, Photodiodes
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