Mr. JongHoon Lim Profile

JongHoon Lim

at SK hynix system ic Inc

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Publications (3)

Proceedings Article | 9 July 2015 Paper

The study of develop optimization to control various resist defect in Photomask fabrication

JongHoon Lim, ByungJu Kim, JaeSik Son, EuiSang Park, SangPyo Kim, DongGyu Yim

Proceedings Volume 9658, 96580Q (2015) https://doi.org/10.1117/12.2193111

KEYWORDS: Photomasks, Photoresist processing, Etching, Inspection, Electroluminescence, Control systems, Chromium, Polymers, Tolerancing, Semiconducting wafers

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Proceedings Article | 8 October 2014 Paper

The feasibility of the additional process for improving pattern collapse in develop process

Jong Hoon Lim, Jae Sik Son, Eui Sang Park, Sang Pyo Kim, Dong Gyu Yim

Proceedings Volume 9235, 92351N (2014) https://doi.org/10.1117/12.2066279

KEYWORDS: SRAF, Inspection, Photomasks, Capillaries, Photoresist processing, Particles, Etching, Defect inspection, Bridges, Optical lithography

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Proceedings Article | 8 November 2012 Paper

CD uniformity improvement through elimination of hardware influences on post-exposure bake

Jong Hoon Lim, Sung Ha Woo, Eui-Sang Park, Sang Pyo Kim, Dong Gyu Yim, Osamu Katada, Tobias Wähler, Peter Dress, Uwe Dietze

Proceedings Volume 8522, 85222L (2012) https://doi.org/10.1117/12.979470

KEYWORDS: Sensors, Mirrors, Photomasks, Photoresist processing, Temperature metrology, Manufacturing, Optimization (mathematics), Photoresist materials, Etching, Critical dimension metrology

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