Dr. Jordi Llobet Profile

Dr. Jordi Llobet

at Institute of Microelectronics of Barcelona IMB-CNM

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Publications (2)

SPIE Journal Paper | 27 July 2015

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Jordi Llobet, Marta Gerbolés, Marc Sansa, Joan Bausells, Xavier Borrisé, Francesc Pérez-Murano

JM3, Vol. 14, Issue 03, 031207, (July 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.031207

KEYWORDS: Silicon, Scanning electron microscopy, Wet etching, Ion beams, Ion implantation, Resonators, Etching, Nanolithography, Ions, Nanowires

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Proceedings Article | 19 March 2015 Paper

Fabrication of functional electromechanical nanowire resonators by focused ion-beam (FIB) implantation

J. Llobet, M. Sansa, X. Borrisé, F. Pérez-Murano, M. Gerbolés

Proceedings Volume 9423, 94230K (2015) https://doi.org/10.1117/12.2085818

KEYWORDS: Silicon, Ion implantation, Ion beams, Scanning electron microscopy, Etching, Resonators, Wet etching, Nanolithography, Photomasks, Nanowires

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