Dr. Juan C. Ivaldi Profile

Dr. Juan C. Ivaldi

VP R&D at Nikon Research Corp of America

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Publications (1)

Proceedings Article | 28 May 2004 Paper

Full field imaging with a 157-nm scanner

Chris Robinson, Nakgeuon Seong, Kurt Kimmel, Timothy Brunner, Michael Hibbs, Michael Lercel, Diane McCafferty, Harry Sewell, Timothy O'Neil, Juan Ivaldi, Keith Andresen

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.537447

KEYWORDS: Reticles, Critical dimension metrology, Photomasks, Binary data, Lithography, Scanners, Scanning electron microscopy, Phase shifts, Semiconducting wafers, Optical lithography

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