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Juha Larismaa
at Okmetic Oyj
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Publications (1)
Proceedings Article | 12 March 2024 Presentation + Paper
Power-efficient thermo-optic phase shifters with cavity-SOI
Päivi Heimala, Mikko Harjanne, Somnath Paul, Markku Kapulainen, Fei Sun, Juha Larismaa, Timo Aalto
Proceedings Volume 12891, 128910G (2024) https://doi.org/10.1117/12.3002326
KEYWORDS: Silicon photonics, Integrated optics, Waveguides, Phase shifts, Silicon, Semiconducting wafers, Wafer bonding, Power consumption, Fabrication
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