Dr. Jürg Bryner Profile

Dr. Jürg Bryner

at ETH Zürich

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 18 March 2009 Paper

Physical properties of thin nanoimprint polymer films measured by photo-acoustic metrology

T. Kehoe, J. Bryner, V. Reboud, J. Vollmann, C. Sotomayor Torres

Proceedings Volume 7271, 72711V (2009) https://doi.org/10.1117/12.814162

KEYWORDS: Polymers, Polymer thin films, Photoacoustic spectroscopy, Interfaces, Acoustics, Nanoimprint lithography, Silicon, Polymethylmethacrylate, Metrology, Head-mounted displays

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Proceedings Article | 20 March 2008 Paper

Sub-wavelength optical diffraction and photoacoustic metrologies for the characterisation of nanoimprinted structures

T. Kehoe, J. Bryner, V. Reboud, N. Kehagias, S. Landis, C. Gourgon, J. Vollmann, J. Dual, C. Sotomayor Torres

Proceedings Volume 6921, 69210F (2008) https://doi.org/10.1117/12.772545

KEYWORDS: Diffraction, Diffraction gratings, Polymers, Photoacoustic spectroscopy, Silicon, Nanoimprint lithography, Polymethylmethacrylate, Metrology, Aluminum, Semiconducting wafers

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Proceedings Article | 18 June 2007 Paper

Simulation of the elastic wave propagation in anisotropic microstructures

Juerg Bryner, Jacqueline Vollmann, Dieter Profunser, Jurg Dual

Proceedings Volume 6616, 661637 (2007) https://doi.org/10.1117/12.726132

KEYWORDS: Wave propagation, Silicon, Inspection, Acoustics, Thin films, Polymethylmethacrylate, Picosecond phenomena, Nondestructive evaluation, Microelectromechanical systems, Optical testing

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Proceedings Article | 13 June 2005 Paper

Laser acoustic characterization of Ta and TaN diffusion barriers beneath Cu layers

Jacqueline Vollmann, Dieter Profunser, Jurg Bryner, Jurg Dual

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612559

KEYWORDS: Acoustics, Tantalum, Copper, Diffusion, Reflectivity, Photoacoustic spectroscopy, Transmission electron microscopy, Interfaces, Scanning electron microscopy, Absorption

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Proceedings Article | 7 June 2002 Paper

Measurement and simulation of the laser-based thermo-elastic excitation and propagation of acoustic pulses for thin film and MEMS inspection

Dieter Profunser, Jacqueline Vollmann, Jurg Bryner, Jurg Dual

Proceedings Volume 4703, (2002) https://doi.org/10.1117/12.469627

KEYWORDS: Acoustics, Thin films, Nondestructive evaluation, Optical simulations, Microelectromechanical systems, Inspection, Photovoltaics, Reflection, Aluminum, Reliability

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