We have developed a solid-state LiDAR sensor with combination of pixelized laser beam sources and BCSCs (beam collimation and steering components). We utilized 2-Dimensional matrix addressable VCSEL arrays as Laser sources. Additionally two alternatives, combination of a microlens and a microprism plate and metalens plates, are tested as a candidate of the BCSC. This technology enables us to realize true solid-state LiDARs without mechanically moving part for scanning laser beams. We verified that our LiDAR can detect the objects which are in range of 100 meters and FOV (field of view) can be spanned up to 360o by combing of multiple sensor modules. The key components were fabricated semiconductor processing and paves the way for disruptive robust and mass-producible LiDAR sensors.
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