Mr. Kai-Yu Cheng Profile

Kai-Yu Cheng

at Industrial Technology Research Institute

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 12 April 2005 Paper

Fiber optic interferometric sensors for micro-positioning applications

Kai-Yu Cheng, Yu Yi Su, Yen-Liang Chen, Hung-Ming Tai, Jung-Tsung Chou

Proceedings Volume 5852, (2005) https://doi.org/10.1117/12.621943

KEYWORDS: Fiber optics sensors, Ferroelectric materials, Sensors, Actuators, Interferometry, Microscopes, Fiber optics, Mirrors, Channel projecting optics, 3D image processing

Read Abstract +

Proceedings Article | 2 August 2004 Paper

Method for continuous end standard measurement utilizing laser interferometer

Kai-Yu Cheng, Chung-Chi Tang, Wei-Cheng Chang, Chao-Jung Chen, Tsai-Fu Wu, Jung-Tsung Chou

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.559455

KEYWORDS: Interferometers, Lithium, Standards development, Calibration, Sensors, Temperature sensors, Laser based displays, Sensing systems, Control systems, Lasers

Read Abstract +

Proceedings Article | 2 August 2004 Paper

The study of fiber optic interferometer for the calibration of PZT travel distance

Kai-Yu Cheng, Jung-Tsung Chou, Hung-Ming Tai, Huang-Chi Huang

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.559235

KEYWORDS: Interferometers, Actuators, Fiber optics, Fiber optics sensors, Sensors, Ferroelectric materials, Optical fibers, Calibration, Electrodes, Signal detection

Read Abstract +

Proceedings Article | 20 November 2003 Paper

Static calibrations of LVDT sensors for traceable gauge blocks

Chung-chi Tang, Kai-Yu Cheng, Huang-Chi Huang

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.505286

KEYWORDS: Calibration, Sensors, Lithium, Interferometers, Statistical analysis, Sensor calibration, Distance measurement, Error analysis, Standards development, Transformers

Read Abstract +

Proceedings Article | 20 November 2003 Paper

Automated calibration system for laser interferometers

Chung-Chi Tang, Kai-Yu Cheng

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.508607

KEYWORDS: Calibration, Lithium, Interferometers, Laser imaging, Environmental sensing, Sensors, Laser systems engineering, Refractive index, Distance measurement, Telecommunications

Read Abstract +

Proceedings Article | 26 April 2001 Paper

Polygate within wafer CD uniformity improvement by the minimization of lens heating effect

Yuh-Sen Chang, M. Wu, Ming-Yeon Hung, K. Cheng, J. Hsieh

Proceedings Volume 4404, (2001) https://doi.org/10.1117/12.425219

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Camera shutters, Reticles, Data modeling, Semiconductor manufacturing, Photomasks, Image processing, Image sensors, Lithography

Read Abstract +

Showing 5 of 6 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years