Micro-Electro-Mechanical Systems (MEMS) have been growing in interest in recent years. Due to the small size of the MEMS, the traditional method of metrology measurement seriously affects the parameter of the object being measured, and high accuracy metrology cannot be acquired. MEMS microstructure images of surface are most composed of a number of steps, grooves and slots. Pattern analysis and recognition of these microstructures with linear feature is one of the key problems in metrology and testing technology of Micro-Electro-Mechanical-System (MEMS). Effective detections of these components play an important role in simplifying feature model in pattern recognition and pattern match. Traditional Linear feature detectors based on pixel processing each by each may fail to detect out lines in image with low SNR. A fast discrete beamlet transform and a novel method of linear feature detection are proposed, which can detect lines with any orientation, location and length. Experiment results prove the efficiency of the method proposed even in image with very low SNR.
Surface texture is generally a significant technique requirement of high-tech products. Surface quality information can usually play an increasing role in achieving interoperability among existing products, create order in markets, simplify production and ensure safety. As the most authoritative standard organizations, ASME and ISO services are used throughout the world, their codes and standards influence global manufacturers and consumers. ASME B46.1 is one of many vital tools to promote surface measurement techniques, while ISO has a set standard system for surface measurement, analysis and evaluation. This paper compares the ASME B46.1 (2002) standard (Surface texture: surface roughness, waviness, and lay) with ISO 3274 (1997) standard on methods of surface profiles filtering. It preformed the present research in order to show the latest developments of the ASME B46.1 (2002) in the regime of contact profiling techniques where the degree of measurement control is highly advanced, and a large range of other techniques that present valid and useful descriptions of surface texture. Also, this paper shows the differences of terms, definitions and surface texture parameters between ASME B46.1 (2002) and ISO 4287 (1998). The different evaluation results have been calculated based on above two standards for the same surface data. Obviously, it is necessary to consider the divergence above to develop China's standards (GB) on surface texture.
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