We employ aligned two-photon lithography (A2PL®), to push high precision alignment tasks from the photonic packaging step towards the fabrication process in a one step process. Combined with Two-Photon Grayscale Lithography (2GL®), this approach enables direct fabrication of micro-optical elements onto devices, enhancing functionality with highest surface quality and shape fidelity at high throughput. We demonstrate automated 3D alignment using customer-ready detection algorithms, to fabricate micro-optical elements attached to various topographies and material platforms with exceptional accuracy below 100 nm. We showcase micro-optical elements aligned to fiber tips, photonic edge couplers, and photonic grating couplers to demonstrate the validity of A2PL for improved coupling losses and beam quality.
In this invited presentation we introduce aligned multiphoton lithography (AML®). In contrast to traditional mask(less) aligners based on one-photon lithography, in AML®, 3-dimensional shapes can be generated and aligned to 3-dimensional topographies. The unique resolution and design freedom of AML® opens new horizons for optical applications, hybrid photonic integration, MEMS, medicine, or life science applications. In this session we present the design and fabrication of micro-optical elements aligned to fiber tips, chip edge couplers, and laser output facets. The characterization of these elements is in very good agreement with simulations allowing us to also present experiments demonstrating low-loss coupling between the elements.
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