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Karen Nummy
at GLOBALFOUNDRIES Inc.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 March 2017 Paper
Silicon photonics and challenges for fabrication
N. Feilchenfeld, K. Nummy, T. Barwicz, D. Gill, E. Kiewra, R. Leidy, J. Orcutt, J. Rosenberg, A. Stricker, C. Whiting, J. Ayala, B. Cucci, D. Dang, T. Doan, M. Ghosal, M. Khater, K. McLean, B. Porth, Z. Sowinski, C. Willets, C. Xiong, C. Yu, S. Yum, K. Giewont, W. M. Green
Proceedings Volume 10149, 101490D (2017) https://doi.org/10.1117/12.2263472
KEYWORDS: Waveguides, Silicon, Germanium, Silicon photonics, Manufacturing, Photonic devices, Sensors, Fiber couplers, Scanning electron microscopy, Structured optical fibers
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