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Katsuji Tabara
at Fujitsu Ltd
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Publications (1)
Proceedings Article | 28 June 2005 Paper
Effectiveness of mask data process using OASIS format
Katsuji Tabara, Mitsuo Sakurai, Seiji Makino, Takahisa Itoh, Tomoyuki Okada
Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617148
KEYWORDS: Data conversion, Data processing, Optical proximity correction, Data storage, Data modeling, Photomasks, Logic devices, Binary data, Data compression, Instrument modeling
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