Dr. Kazuya Goto Profile

Dr. Kazuya Goto

at JEOL Ltd

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Publications (3)

Proceedings Article | 26 May 2010 Paper

Evaluation of a next generation EB mask writer for hp 32nm lithography

Tadashi Komagata, Takahisa Hasegawa, Kazuya Goto, Kenji Kono, Ryuuji Yamamoto, Naoki Nishida, Yasutoshi Nakagawa

Proceedings Volume 7748, 77480I (2010) https://doi.org/10.1117/12.866750

KEYWORDS: Photomasks, Lithography, Extreme ultraviolet lithography, Electron beams, Beam shaping, Semiconductors, Measurement devices, Double patterning technology, Critical dimension metrology, Interferometers

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Proceedings Article | 19 May 2008 Paper

Improvement of position accuracy in mask-writing electron beam lithography with a multi-pass writing strategy for reducing position errors due to resist charging

Noriyuki Kobayashi, Kazuya Goto, Tetsuro Wakatsuki, Tadashi Komagata, Yasutoshi Nakagawa

Proceedings Volume 7028, 70281Y (2008) https://doi.org/10.1117/12.793076

KEYWORDS: Photomasks, Electron beams, Electron beam lithography, Raster graphics, Mask making, Chemically amplified resists, Semiconductors, Roads, Double patterning technology, Lithography

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Proceedings Article | 14 May 2007 Paper

Reduction of resist heating effect by writing order optimization: part II

Kazuya Goto, Kazutaka Watakabe, Tadashi Komagata, Yasutoshi Nakagawa

Proceedings Volume 6607, 660721 (2007) https://doi.org/10.1117/12.728984

KEYWORDS: Critical dimension metrology, Photomasks, Mask making, Electron beams, Chemically amplified resists, Electron beam lithography, Resolution enhancement technologies, Temperature metrology, Semiconductors, Roads

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