Mr. Keigo Koida Profile

Keigo Koida

at Univ of Hyogo

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Publications (2)

Proceedings Article | 18 May 2009 Paper

Competitive reactions of carbon deposition and oxidation on the surface of Mo/Si multilayer mirrors by EUV irradiation

Masahito Niibe, Keigo Koida

Proceedings Volume 7361, 73610L (2009) https://doi.org/10.1117/12.822286

KEYWORDS: Carbon, Extreme ultraviolet, Reflectivity, Protactinium, Mirrors, Multilayers, Contamination, Oxygen, Extreme ultraviolet lithography, Oxidation

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Proceedings Article | 21 March 2008 Paper

Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas

Keigo Koida, Masahito Niibe, Yukinobu Kakutani, Shuichi Matsunari, Takashi Aoki, Shigeru Terashima, Takahiro Nakayama, Hiromitsu Takase, Yasuaki Fukuda

Proceedings Volume 6921, 69213C (2008) https://doi.org/10.1117/12.771814

KEYWORDS: Mirrors, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Bioalcohols, Carbon, Oxides, Protactinium, Oxygen, Oxidation

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