Mr. Kenneth C. Johnson Profile

Kenneth C. Johnson

Proprietor at KJ Innovation

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Publications (2)

SPIE Journal Paper | 4 October 2019

Maskless EUV lithography, an alternative to e-beam

Kenneth Johnson

JM3, Vol. 18, Issue 04, 043501, (October 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.4.043501

KEYWORDS: Extreme ultraviolet lithography, Mirrors, Microlens, Point spread functions, Diffraction, Photomasks, Scanners, Microlens array, Projection systems

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Proceedings Article | 19 March 2018 Paper

Increasing EUV source efficiency via recycling of radiation power

Ahmed Hassanein, Valeryi Sizyuk, Tatyana Sizyuk, Kenneth Johnson

Proceedings Volume 10583, 1058319 (2018) https://doi.org/10.1117/12.2297254

KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Carbon dioxide lasers, Optical design, Monochromators, Diffraction gratings, Reflectors, Optical simulations, Reflectivity

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