We propose an optical fiber scanner suitable for high-power industrial laser marking systems. The proposed optical scanner enables beam scanning by resonating the optical fiber end with an electric actuator. As our optical scanner is extremely compact and lightweight, high-speed operation can be expected compared with the conventional galvanometer-type optical scanner. In this paper, novel monitoring and compensation techniques of the beam scanning path utilizing a position-sensitive detector in order to compensate for the manufacturing errors of optical fiber scanners are discussed. We demonstrate that the beam can be scanned linearly at a resonance frequency of about 10 kHz by appropriately controlling the amplitude and phase difference of the applied voltage.
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