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Dr. Kuang-Po Chang
at Industrial Technology Research Institute
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Publications (1)
Proceedings Article | 14 December 2009 Paper
Generation and characterization of spatially distributed laser produced plasma extreme ultraviolet source
Kuang-Po Chang, Oran Morris, Fergal O'Reilly, Padraig Dunne, Gerard O'Sullivan
Proceedings Volume 7520, 75202P (2009) https://doi.org/10.1117/12.839648
KEYWORDS: Plasma, Extreme ultraviolet, Tin, Diffractive optical elements, EUV optics, Spectrographs, Extreme ultraviolet lithography, Absorption, Calibration, Diffraction
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