Ms. Kumiko Matsui Profile

Kumiko Matsui

at Nikon Corp

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Proceedings Article | 20 October 1992 Paper

Fringe-scanning white-light microscope for surface profile measurement and material identification

Kumiko Matsui, Satoshi Kawata

Proceedings Volume 1720, (1992) https://doi.org/10.1117/12.132119

KEYWORDS: Microscopes, Copper, Aluminum, Interferometry, Objectives, Ferroelectric materials, Reflectivity, Crystals, Fourier transforms, Heterodyning

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A new fringe-scanning microscope based on a coherence probe microscope is described for measuring both the surface profile and the local material of a heterogeneous sample in nanometer depth resolution. The basic configuration is a white-light double-beam interferometer with either a Michelson or Mirau objective lens. The sample stage is moved down during the measurement and an interference image is collected at every stage-height. The surface profile is reconstructed in the computer by tracing the darkest point of the white- light interferogram for each pixel. The surface material is identified pixel by pixel by calculating the amplitude and the phase reflectivity of the spectrum by Fourier transforming a local interferogram or taking a cross-correlation of it with reference ones. Experimental examples of surface profile reconstruction, including a sample with film on it, are shown. An experimental result of local material identification is also presented.

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